| 摘要 |
PURPOSE:To uniformly pressurize substrate material through a thin film-shaped platelike vessel by providing the vessel in which the heating medium of fluid is filled on the pressurization faces of the upper and lower heating plates for the substrate material. CONSTITUTION:Thin film-shaped platelike vessels 38a, 38b filled with the heating medium 37 of fluid are formed on the upper and rear surfaces of the upper and lower heating plates 11a, 11b. Substrate materials 40 are inserted into the interval thereof and positioned. Shallowly recessed grooves are provided on the upper surface of the lower heating plate 11a and the rear surface of the upper heating plate 11b. The whole circumferential edge of a thin layer 38 is watertightly provided in the whole circumferential edge thereof. The vessels 38a, 38b are constituted by filling the heating medium 37 of fluid in the space formed of the thin film 38 and the heating plates 11a, 11b. When high-pressure oil is supplied to a main oil pressure cylinder 3, the lower bolster 6 is raised and the platelike vessels 38a, 38b are brought into contact with the projected parts of the substrate materials 40 and dislocation is not caused in the upper and lower substrate materials 40. The platelike vessels 38a, 38b are stuck on the whole surface of the substrate materials 40 by movement of the lower bolster 6. Heat transmission and pressurization are performed by the uniform interfacial pressure. |
