| 摘要 |
PURPOSE:To measure the concentration distribution more correctly by removing an influence of a knock-on effect to the utmost even in the case of concetration distribution of impurities having infinitesimal quantity or sharp concentration distribution. CONSTITUTION:Secondary ton mass spectrometry(SIMS) is performed plural times for a sample to be analyzed under at least two or more different conditions. in acceleration energy of primary ions to obtain plural temporary concentration distributions. Subsequently, plural differences in depth at the same concentration in the plural temporary concentration distributions are obtained while the concentration is changed, and according to a difference in depth at the same concentration, an estimated depth in the case where the acceleration energy of primary ions is supposed to be zero is obtained each for every corresponding concentration. The points of estimated depthes in the corresponding concentrations are connected to each other to obtain the distribution of estimated concentration. A difference in concentration between peak values of plural temporary concentration distributions is obtained, and the peak value of estimated concentration distribution in the case where the acceleration energy of primary ions is supposed to be zero is obtained from the above difference in concentration of peak values. |
