MONITORING DEVICE FOR ELECTRON BEAM MACHINE

摘要

PURPOSE:To provide the monitoring device for an electron beam machine by which the deterioration in the component parts of the machine can be predicted and dealt with. CONSTITUTION:The exhaust time T from starting the exhaust from the chamber of an electron beam welder until becoming the state of vacuum weldable in the chamber is detected by a means 21 for measuring the exhaust time, and the average value per day of the time T is computed by an arithmetic means 22 for such average value. The change of the time T from then on is predicted from the hysteresis of the average value per day by a predicting means 23; an excess period until the predicted time T reaches a prescribed threshold value is computed by an arithmetic means 24 for such excess period; and when the excess period comes within a prescribed warning period, a warning is issued by a first warning means 25.