发明名称 |
DIELECTRIC CERAMICS FOR ELECTROSTATIC CHUCKS AND METHOD OF MAKING THEM |
摘要 |
A dielectric ceramic for use in an electrostatic chuck, formed by firing in a reducing atmosphere a ceramic material mainly comprised of alumina, wherein said ceramic material comprises an alkaline earth metal in an amount of from 1.0 to 6.0 % by weight in terms of oxide and a transition metal in an amount of from 0.5 to 6.0 % by weight in terms of oxide. Also disclosed is a method of making a dielectric ceramic for use in an electrostatic chuck, comprising firing a ceramic material mainly comprised of alumina and containing from 1.0 to 6.0 % by weight of an alkaline earth metal in terms of oxide and from 1.0 to 6.0 % by weight of a transition metal in terms of oxide, in a reducing atmosphere while controlling the dew point of atmosphere gas. |
申请公布号 |
CA1336476(C) |
申请公布日期 |
1995.08.01 |
申请号 |
CA19890597909 |
申请日期 |
1989.04.26 |
申请人 |
TOTO LTD. |
发明人 |
WATANABE, TOSHIYA;KITABAYASHI, TETSUO;NAKAYAMA, CHIAKI |
分类号 |
C04B35/111;C04B35/64;H01L21/683;(IPC1-7):C04B35/10;H01L21/00 |
主分类号 |
C04B35/111 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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