发明名称 |
Controlled removal of ceramic surfaces with combination of ions implantation and ultrasonic energy |
摘要 |
A method for tailoring or patterning the surface of ceramic articles is provided by implanting ions to predetermined depth into the ceramic material at a selected surface location with the ions being implanted at a fluence and energy adequate to damage the lattice structure of the ceramic material for bi-axially straining near-surface regions of the ceramic material to the predetermined depth. The resulting metastable near-surface regions of the ceramic material are then contacted with energy pulses from collapsing, ultrasonically-generated cavitation bubbles in a liquid medium for removing to a selected depth the ion-damaged near-surface regions containing the bi-axially strained lattice structure from the ceramic body. Additional patterning of the selected surface location on the ceramic body is provided by implanting a high fluence of high-energy, relatively-light ions at selected surface sites for relaxing the bi-axial strain in the near-surface regions defined by these sites and thereby preventing the removal of such ion-implanted sites by the energy pulses from the collapsing ultrasonic cavitation bubbles.
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申请公布号 |
US5437729(A) |
申请公布日期 |
1995.08.01 |
申请号 |
US19930045475 |
申请日期 |
1993.04.08 |
申请人 |
MARTIN MARIETTA ENERGY SYSTEMS, INC. |
发明人 |
BOATNER, LYNN A.;RANKIN, JANET;THEVENARD, PAUL;ROMANA, LAURENCE J. |
分类号 |
B08B3/12;C04B41/53;C04B41/91;C23C14/48;(IPC1-7):B08B3/12 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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