发明名称 |
Robot-teaching cassette |
摘要 |
A robot-teaching cassette is used to teach a robot to position a wafer cassette or a substrate cassette on a cassette-supporting base by the robot, without using the wafer cassette or the substrate cassette. The robot-teaching cassette includes a fixing section capable of being fixed in position on the cassette-supporting base, a moving section capable of being held with a robot-chucking section of the robot and moving separately from the fixing section, a light source provided on the fixing section or the moving section, and a target establishing a reference position, for receiving beams emitted by the light source and provided on the fixing section or the moving section.
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申请公布号 |
US5438418(A) |
申请公布日期 |
1995.08.01 |
申请号 |
US19930049496 |
申请日期 |
1993.04.21 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
FUKUI, SHOJI;WATANABE, TOSHIYUKI;SUZUKI, MASAKI |
分类号 |
H01L21/00;H01L21/673;(IPC1-7):G01B11/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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