发明名称 Method for suppression of electrification
摘要 Electrification is suppressed with a water-soluble electrification-suppressing film having an electron conductivity and comprising a polymer resin. A high electrification-suppressing effect which is also high in vacuum can be easily obtained by using the electrification-suppressing film with less contamination.
申请公布号 US5437893(A) 申请公布日期 1995.08.01
申请号 US19930051841 申请日期 1993.04.26
申请人 HITACHI, LTD;SHOWA DENKO K. K. 发明人 MURAI, FUMIO;SUZUKI, YASUNORI;TOMOZAWA, HIDEKI;TAKASHI, RYUMA;SAIDA, YOSHIHIRO;IKENOUE, YOSHIAKI
分类号 G21K5/04;C09D5/24;G03F7/038;G03F7/09;G03F7/11;G03F7/20;H01J37/305;H01J37/317;H01L21/027;H01L21/265;H01L21/266;H01L21/66;(IPC1-7):B05D3/06 主分类号 G21K5/04
代理机构 代理人
主权项
地址