| 摘要 |
PURPOSE:To reduce the number of ports to be provided at a chamber. CONSTITUTION:A fluid cylinder 22 disposed in a chamber 11 to vertically move a screen 31 for reflecting a beam 29 passed through the chamber 11 is installed out of a port 12 provided at the upper part of the chamber 11, and a camera 21 for photographing a beam 29 reflected on the screen 31 is installed on the same side as the side installing the cylinder 22 with the chamber 11 as a reference.
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