| 摘要 |
PURPOSE: To provide an acceleration sensor made of crystalline materials of which a part of the components are single crystals and a part are polycrystalline materials. CONSTITUTION: A strip-like seismic mass 10 is made of a polycrystalline material and its suspended body allows the movement in the longitudinal direction in the case of occurrence of acceleration in a terminal range by a suspended web 11 made of a single crystalline material. A plate 13 is extended from the mass 11 in parallel to the transverse direction in relation to the longitudinal direction of the mass 10 and together with another plate 14 fixed in a based in parallel to the plate 13, the plate 13 constitutes a capacitor mechanism and is made of a single crystal. The single crystal materials are doped with substances to obtain electric conductivity. |
