SINGLE CRYSTAL PULL-UP APPARATUS,申请号JP19930350007-传众专利搜索

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发明名称	SINGLE CRYSTAL PULL-UP APPARATUS
摘要
申请公布号	JPH07196398(A)	申请公布日期	1995.08.01
申请号	JP19930350007	申请日期	1993.12.28
申请人	MITSUBISHI MATERIALS CORP	发明人	TSUUGUCHI AKIRA
分类号	C30B15/30;C30B29/06;H01L21/208;(IPC1-7):C30B15/30	主分类号	C30B15/30
代理机构		代理人
主权项
地址

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