SLURRY SUPPLY METHOD AND NOZZLE OF WIRE SAW

摘要

PURPOSE:To eliminate the cutting defect of an ingot and to enhance processing accuracy. CONSTITUTION:In a slurry supply method of a wire saw 2, slurry guide members 3 having an almost same cross-sectional shape are attached to both end parts 12 of an ingot 7 and a supply nozzle 4 opened over the total length of the ingot 7 in the longitudinal direction thereof is opposed to the surface of the ingot 7 and the surfaces of the slurry guide members 3 and a slurry 10 is supplied to the surface of the ingot 7 and the surfaces of the slurry guide members 3 from the supply nozzle 4.