发明名称 |
Apparatus for measuring the life time of minority carriers of a semiconductor wafer |
摘要 |
An apparatus for measuring the life time of minority carriers includes a light source for irradiating a first region of a semiconductor wafer, a microwave generator for generating microwaves, a transmission line for transmitting a first part of the generated mark raised to the region of the semiconductor wafer that is radiated by the excitation light and a second portion of the generated microwave to a region of the semiconductor wafer that is not radiated by the excitation light. The intensity of the microwave signals reflected from the semiconductor wafer are detected and the life time of the minority carriers is calculated based upon the detected intensities.
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申请公布号 |
US5438276(A) |
申请公布日期 |
1995.08.01 |
申请号 |
US19930059764 |
申请日期 |
1993.05.12 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO;LEO CORPORATION |
发明人 |
KAWATA, YUTAKA;KUSAKA, TAKUYA;HASHIZUME, HIDEHISA;OJIMA, FUTOSHI |
分类号 |
G01N21/00;G01N22/00;G01R31/265;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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