发明名称 System and method for unipolar magnetic scanning of heavy ion beams
摘要 A magnetic deflection system for scanning an ion beam over a selected surface comprising: a magnetic structure having poles with respective scanning coils and respective pole faces that define therebetween a gap through which the ion beam passes; a primary current source coupled to the scanning coils adapted to apply to the scanning coils an excitation current to generate a substantially unipolar oscillatory magnetic field in the gap that alternates in polarity as a function of time to cause scanning of the ion beam, the substantially unipolar magnetic field having a magnitude sufficiently greater than zero to prevent the transverse cross-section of the ion beam from substantially fluctuating in size while the ion beam is being scanned across the selected surface.
申请公布号 US5438203(A) 申请公布日期 1995.08.01
申请号 US19940257989 申请日期 1994.06.10
申请人 NISSIN ELECTRIC COMPANY 发明人 GLAVISH, HILTON F.;GUERRA, MICHAEL A.;KAWAI, TADASHI;NAITO, MASAO;NAGAI, NOBUO
分类号 H01J37/147;H01J37/317;H01L21/265;(IPC1-7):H01J37/141 主分类号 H01J37/147
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