发明名称 |
System and method for unipolar magnetic scanning of heavy ion beams |
摘要 |
A magnetic deflection system for scanning an ion beam over a selected surface comprising: a magnetic structure having poles with respective scanning coils and respective pole faces that define therebetween a gap through which the ion beam passes; a primary current source coupled to the scanning coils adapted to apply to the scanning coils an excitation current to generate a substantially unipolar oscillatory magnetic field in the gap that alternates in polarity as a function of time to cause scanning of the ion beam, the substantially unipolar magnetic field having a magnitude sufficiently greater than zero to prevent the transverse cross-section of the ion beam from substantially fluctuating in size while the ion beam is being scanned across the selected surface.
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申请公布号 |
US5438203(A) |
申请公布日期 |
1995.08.01 |
申请号 |
US19940257989 |
申请日期 |
1994.06.10 |
申请人 |
NISSIN ELECTRIC COMPANY |
发明人 |
GLAVISH, HILTON F.;GUERRA, MICHAEL A.;KAWAI, TADASHI;NAITO, MASAO;NAGAI, NOBUO |
分类号 |
H01J37/147;H01J37/317;H01L21/265;(IPC1-7):H01J37/141 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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