Electro-optical system for gauging surface profile deviations

摘要

A method and system for gauging deviations of a surface of a test part from a preselected nominal surface profile is disclosed. The system includes a support having a master surface that is substantially a matched or mating surface of the nominal surface profile of the test part and a thin layer of an attenuating medium such as a dye liquid between the master and test surfaces. Electromagnetic radiation is directed through the support and master surface and through the attenuating layer onto the reflective surface of the test part. An image sensor such as a camera is positioned to receive an image of the radiation reflected by the test part surface back through the attenuating layer and support, with the intensity of such radiation across the image varying as a function of the deviation of the test part surface from the nominal surface profile. The sensor output is digitized to form a series of digital signals indicative of the intensity of radiation associated with each location of the reflected image, and the digitized pixel signals are stored in digital electronic memory and/or displayed on a screen. Computer programming corrects the digitized intensity signals for sensor gain, bias and variations in part reflectivity, and presents a quantitative measurement of the deviations in test surface profile from the master surface profile over the entire surface being measured.