METHOD FOR FORMING LUBRICATING FILM AND FORMING APPARATUS THEREFOR

摘要

PURPOSE:To form a stable lubricating film on a work surface regardless of the material or state of the surface by irradiating a film-forming gas having a low molecule density with laser light and compressing and then diffusing the gas to conduct vapor- phase polymerization. CONSTITUTION:This process comprises: a first step in which a film-forming gas having a low molecule density is irradiated with laser light to cause a reaction under such conditions that the laser light transmittance is 5% or lower, i.e., at least 95% of the light is absorbed by the gas; a second step in which the gas is compressed; and a third step in which the compressed gas is diffused. Through these steps, the gas undergoes oxidative photopolymerization to form a lubricating film on a work surface. The drawing is a diagrammatic view of an apparatus for producing a lubricating film. A work comprising a stainless-steel disk is placed in a work-holding chamber 5, which is evacuated with a vacuum pump 7. Perfluoropropene is mixed with oxygen in a molar ratio of 1:5 by means of a gas mixer/feeder 6 and a solenoid valve 9 is then opened to feed the mixed gas to an irradiation part 2. The gas passes through a polymerization part 3 and a diffusion part 4 and is then diffused into the chamber 5 to form a lubricating film.