发明名称 Linearly fine-adjustable stage
摘要 The stage plate of a sample carrying stage for optical instruments has a piezoelectric translator that drives the stage plate centrally and directly, and a linear guide comprising at least two elastic elements to guide the stage plate. The elastic elements are arranged coaxially to the piezoelectric translator, which extends through a central recess in the elastic elements.
申请公布号 US5438451(A) 申请公布日期 1995.08.01
申请号 US19930123378 申请日期 1993.09.17
申请人 SCHWEIZER, BRUNO 发明人 SCHWEIZER, BRUNO
分类号 B23Q1/34;B23Q1/36;F16C29/00;G02B21/26;G12B5/00;H01L41/09;(IPC1-7):G02B21/26;G02B26/08 主分类号 B23Q1/34
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