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发明名称
摘要
申请公布号
JPH0770733(B2)
申请公布日期
1995.07.31
申请号
JP19880039153
申请日期
1988.02.22
申请人
发明人
分类号
H01L21/8249;H01L21/338;H01L21/822;H01L27/04;H01L27/06;H01L29/417;H01L29/78;H01L29/80;H01L29/812;H03K17/687;(IPC1-7):H01L29/80
主分类号
H01L21/8249
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