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发明名称
摘要
申请公布号
JPH0770587(B2)
申请公布日期
1995.07.31
申请号
JP19910252905
申请日期
1991.09.05
申请人
发明人
分类号
H01L21/76;H01L27/146;(IPC1-7):H01L21/76
主分类号
H01L21/76
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