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发明名称
摘要
申请公布号
JPH0770551(B2)
申请公布日期
1995.07.31
申请号
JP19860036646
申请日期
1986.02.20
申请人
发明人
分类号
H01L21/52;H01L21/58;H01L21/60;(IPC1-7):H01L21/52
主分类号
H01L21/52
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代理人
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