发明名称 TWIST ACTUATOR AND ITS MANUFACTURE
摘要 PURPOSE: To provide a large torsional angle with a low control voltage by providing a lateral head contact through a method, with which the 1st adjacent electrode of 1st/4th or 2nd/3rd quadrant can be at a positive potential with respect to the reference voltage of a central electrode and the other potential can be at a negative potential, on the other hand. CONSTITUTION: Concerning an actuator 10 plural electrodes 22, 23 and 24 are mutually parallel extended and terminated away from the edge part of plural parallel piezoelectric layer 20, and a surface is provided for disconnecting the plural electrodes 22, 23 and 24 along with a lengthwise axis and connecting them concerning the respective groups of plural electrodes 22, 23 and 24. These surfaces are extended to the edge parts of plural piezoelectric layers 20, and then these surfaces are polarized in a single direction, while making the plural adjacent layers 20 orthogonal to the electrode 22. The large torsional angle can be provided with a low voltage because of the head contact, with which the 1st adjacent electrode of 1st/4th or 2nd/3rd quadrant can be at a positive potential with respect to the reference voltage of the central electrode 22 concerning center lines 19 and 39 of an end face and the other plural electrodes can be at the negative potential.
申请公布号 JPH07193292(A) 申请公布日期 1995.07.28
申请号 JP19940231764 申请日期 1994.09.27
申请人 PHILIPS ELECTRON NV 发明人 YUUBE DEIBERUN;YOZEFU PANKERUTO
分类号 H01L41/083;H01L41/09;H01L41/273;H01L41/297;H02N2/00;H02N2/04 主分类号 H01L41/083
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