发明名称 MULTILAYER GOLD-PLATED ELECTRODE AND ITS MANUFACTURE
摘要 PURPOSE:To provide a multilayer gold-plated electrode including a gold bump having the excellent adhesiveness. CONSTITUTION:A multilayer gold-plated electrode includes a first gold-plating layer 4, a Ti middle layer 5 having a thickness of 300-700Angstrom , an Au middle layer 6 having a thickness of 800-1500Angstrom and a second gold-plating layer 7 which are built up successively. The adhesiveness between the first gold-plating layer 4 and the second gold-plating layer 7 can be significantly improved by a heat treatment at a temperature not lower than 250 deg.C and for a time not shorter than 10 minutes.
申请公布号 JPH07193069(A) 申请公布日期 1995.07.28
申请号 JP19930332237 申请日期 1993.12.27
申请人 SHARP CORP 发明人 MIYAUCHI MASATO
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
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