| 摘要 |
PURPOSE:To easily draw out fixed electrodes by providing dielectric bodies (glass plates) between a mobile electrode and the fixed electrodes. CONSTITUTION:An acceleration sensor is provided with a silicon plate in which a mobile electrode 5 is formed as a weight which is displaced in accordance with acceleration and fixed electrodes 24 and 25 which are provided opposite to the electrode 5. Glass plates 22 and 23 are provided between the mobile electrode 5 and fixed electrodes 24 and 25 as dielectric bodies. A mobile electrode section is composed of the electrode 5, a beam 14 supporting the electrode 5, and weight fixing sections 20 and 21. When the gaps between the electrode (weight) 5 and glass plates 22 and 23 change due to impressed acceleration, the capacitance between the fixed electrodes 24 and 25 changes. Therefore, the acceleration can be recognized from the magnitude of the change. |
