| 摘要 |
PURPOSE: To provide a device and a method for detecting a laser beam position. CONSTITUTION: This method is to detect the spatial position of a laser beam via the detection of an acoustic signal generated with the beam, regarding an object allowing installation in a laser beam path. A laser 1 is controlled with a control system 2 under the application of a waveform changing, depending on a square wave modulation function. Also, laser beams 3 have power modulation signals, and the object has sensors 9a and 9b capable of detecting acoustic signals generated thereon due to the laser beams 3. At the same time, the sensors 9a and 9b detect the output of acoustic sensing signals corresponding to the power modulation of incident laser beams and a phase difference between detected signals. In addition, a processor is provided for processing the output of an acoustic sensor, and this processor includes a means for detecting each of output signals corresponding to the power modulation of laser output beams, and a phase sensing detector for detecting a phase difference between the detected signals. |
