| 摘要 |
PURPOSE:To realize compact size and low cost by constituting a vibrator of two cantilever beam vibrators supported on a substrate and keeping the beam vibrators orthogonal with each other within the same plane. CONSTITUTION:Two silicone cantilever beam vibrators 1 of the same size and shape are arranged on a silicon substrate 2, so as to keep axes of beams 1a and 1b orthogonal with each other. Also, when AC voltage of a frequency near the resonance frequency of a beam bending vibration is applied to the piezoelectric and electrostrictive thin film 3 of the beams 1a and 1b, the beams 1a and 1b synchronize with each other, due to a piezoelectric inverse effect, thereby exciting a natural vibration. At this stage, when the beams 1a and 1b begin to rotate about a shaft, a Coriolis' force Fc expressed as Fc=2m[V.OMEGA] is generated in both axial and vibrational directions of the beams 1a and 1b, where (m) stands for the mass of the vibrator, V for vibrational speed and OMEGAfor rotational angular velocity. This force Fc is detected via a piezoelectric normal effect, thereby finding angular velocity OMEGA around the shaft. As a result, the rotational angular velcoty OMEGA in two orthogonal directions can be detected with a single element. |
