| 摘要 |
<p>PURPOSE:To detect a correct flow velocity for a long time without changing an output of a detecting element even when a room temperature is changed and without changing static characteristics of the detecting element even when a temperature coefficient of a resistance of a heat-generating body and a resistivity are deteriorated with time. CONSTITUTION:Heat-sensitive elements 10, 20 are formed of substrates 11, 21 with recesses 12, 22. Heat-sensitive (heat-generating) beam parts 13, 23 are supported over the recesses 12, 22. Heat-generating resistance bodies, or heat- generating resistance bodies and temperature measuring-resistance bodies Rh for detecting a temperature of a heat-sensitive part are arranged over the beam parts 13, 23. Moreover, temperature-measuring resistance bodies Rf for measuring a temperature of a fluid and electrodes 14a-14d, 24a-24d for the heat- generating resistance bodies Rh and temperature-measuring resistance bodies Rf are provided at edges of the substrates 11, 12. The two heat-sensitive elements have the same static characteristics and different dynamic characteristics, i.e., different dependences on the fluid.</p> |
