| 摘要 |
<p>PURPOSE:To suppress a fluctuation of electric resistance of an electron emitting part forming thin film and to collect its material made reusable. CONSTITUTION:An electron emitting part 3 is provided between opposed electrodes 5, 6 formed on an insulating substrate 1. An organic metal compound having volatility is applied onto the substrate, formed with electrodes, to form a thin film 7. A region, where the electron emitting part of this organic metal compound thin film is formed, is coated with a coating material 8. An organic metal compound in a part except the region, coated with this coating material, is removed. By heating the film baked, a thin film 14 consisting of metal particulates or metal oxide particulates or a mixture thereof is created. Next by a current carrying process, the electron emitting part is formed in the thin film.</p> |
