MANUFACTURE OF SURFACE CONDUCTION TYPE ELECTRON EMITTING ELEMENT, SURFACE CONDUCTION TYPE ELECTRON EMITTING ELEMENT MANUFACTURED BY THIS MANUFACTURING METHOD AND ELECTRON SOURCE AND IMAGE FORMING DEVICE USING THIS ELEMENT

摘要

PURPOSE:To provide a surface conduction type electron emitting element having an uniform electron emitting characteristic by reducing deterioration of the element and dispersion of the electron emitting characteristic, in a process of manufacturing the surface conduction type electron emitting element. CONSTITUTION:In a method of manufacturing a surface conduction type electron emitting element having a thin film containing an electron emitting part between electrodes, when this electron emitting part is formed, pulse voltage is applied across these electrodes, to increase a peak value of this pulse voltage in a step shape. The element manufactured by this method of manufacture and an electron source and an image forming device using this element are obtained.