摘要 |
PURPOSE:To surely generate a normal X-ray by air-tightly shielding the inside of an air-tight case with a partition provided over.from a supporting part to an internal surface of the air-tight case, in a coil part, so as to prevent generation of gas and dust from the coil part. CONSTITUTION:A coil part 3b is received to ring-shaped space, partitioned by an annular part 2c, internal surface of an air-tight case part 2a and a partition 20, and air-tightly shielded from the rest of space of the air-tight case part 2a. Accordingly, even when a vacuum is generated in the air-tight case part 2a, the atmospheric pressure or a pressure approximate thereto is generated in the periphery of the coil part 3b, and generation of gas and dust from the coil part 3b can be prevented. Accordingly, a thermion (e) emitted from an electron gun 4 is prevented from colliding against gas and dust, and normal generation of an X-ray can be surely attained. |