| 摘要 |
PURPOSE:To provide an X-ray mirror which excels in the surface flatness, can enhance the reflection efficiency of short-wave X-rays, and can favorably be used in an X-ray exposing device, X-ray microscope, etc. CONSTITUTION:A mirror reflecting X-rays is equipped with a flat film 2 of silicon carbide over the surface of a ceramic substrate 1, wherein the apex angle alpha of a growth trace on a crystal grain of the flat film 2 is made smaller than 40deg. or the secondary crystal grain on the surface of the flat film 2 should have a mean grain size of 40mum or below. |
