METHOD AND APPARATUS FOR EVALUATING SURFACE OF SOLID

摘要

PURPOSE:To realize noncontact evaluation of the surface of a solid by planting a solid and translucent surface to be evaluated in a slit of a plane reflector or on the surface thereof, passing infrared light through the solid 5o be measured from the rear side thereof, and performing reflection spectroscopy. CONSTITUTION:A sample 1 of translucent semiconductor having a surface to be evaluated is planted in a slit 3 made in a plane reflector 2. Infrared light is then projected at a low incident angle from the rear side of the sample 1 while being adjusted such that the slit 3 in the reflector 2 comes in the center of the incident light. Incident light and reflected light are combined in the vicinity of the slit 3 thus increasing the sensitivity at that region. The combined vector has a direction in parallel with the surface of the sample 1 and thereby the molecular oscillation can be detected with high sensitivity in that region. This structure realizes a highly accurate and convenient reflection spectroscopy.