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发明名称
QUALITATIVE ANALYSIS BY PLASMA LIGHT EMISSION ANALYSIS
摘要
申请公布号
JPH07193042(A)
申请公布日期
1995.07.28
申请号
JP19930347787
申请日期
1993.12.25
申请人
MITSUMI ELECTRIC CO LTD
发明人
OGAWA TAKASHI
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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