| 摘要 |
PURPOSE:To manufacture an oxygen sensor with an electrode whose area is accurately prescribed by covering an electrode part with a masking material and by polishing by blast the part which is not covered with the masking material. CONSTITUTION:A nucleus for electroless plating is manufactured on the surface of Tammann tube. For example, palladium 2-ethylhexanate is applied to the surface of the Tammann tube made of modified ZrO2 and a heat gun is used for heating and thermal decomposition. Then, a part where an electrode is to be formed by electroless plating is covered with a masking material, for example silicone rubber, and the other parts are polished by blast. After that, electroless plating is performed and an electrode for an oxygen sensor is prepared or a nucleus for electroless plating is formed and then electroless plating is performed. After that, a part where the electrode is to be formed is covered with a masking material, the other parts are polished by blast to form an electrode for oxygen sensor, thus manufacturing an electrode whose area is accurately prescribed. |
