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发明名称
SCANNING EXPOSURE DEVICE
摘要
申请公布号
JPH07191417(A)
申请公布日期
1995.07.28
申请号
JP19930348028
申请日期
1993.12.24
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
OTSUJI MASAHIKO;TAKEUCHI MASAHIKO;TSUJINO HIROYUKI
分类号
G03B27/50;(IPC1-7):G03B27/50
主分类号
G03B27/50
代理机构
代理人
主权项
地址
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