Gas discharge laser electrode for esp. excimer laser

摘要

The electrode, e.g. an anode, for a gas discharge laser has a metal lining (16,18), e.g. platinum, gold, nickel, etc. The lining is embedded in a body (12,14) of a ceramic material which is insensitive to the electrode burning away. The metallic lining preferably has a width (b) corresponding to the width (e) of the gas discharge. On both sides of the lining the body may be formed such that when two electrodes are arranged opposite each other in the discharge region, the field distribution is homogenous.