发明名称 GASEOUS PRESSURE ADDING PRESS
摘要 PURPOSE:To form a substrate having uniform thickness and high quality at a low cost. CONSTITUTION:Uniform surface pressure by the pressure of high-pressure gas and pressurizing force of a main hydraulic cylinder 3 are applied to a base stock for substates with an upper heat plate 11b and lower heat plate 11a at the same time as the addition of the pressure of high-pressure gas in the sealed space 16S in a cylindrical ring 16. Consequently, since the substrate is formed by two kinds of optimum bonding surface-pressures even when two kinds of adhesives are contributed on the base stock 37 for substrates, a high-quality substrate having uniform finished thickness produced at a low cost. Consequently, by locally adding the surface pressure that is slighty higher than the bonding surface-pressure on necessary places in addition to the uniform bonding surface- pressure, the high-quality substrate having uniform finished thickness is produced at high yield.
申请公布号 JPH07185897(A) 申请公布日期 1995.07.25
申请号 JP19930335429 申请日期 1993.12.28
申请人 HITACHI TECHNO ENG CO LTD;HITACHI LTD 发明人 MIYASHITA AKEMI;FUJII MUTSUMASA;SHIBATA KATSUNORI;OGAWA YOSHIE
分类号 B30B15/02;B30B12/00;B30B15/06;B30B15/34;H05K3/46;(IPC1-7):B30B12/00 主分类号 B30B15/02
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