| 摘要 |
PURPOSE:To produce an ITO sintered body having high density by using indium oxide and tin oxide in which respective ratios of the average grain size to the diameter equivalent to the specific surface area obtd. by a BET method and to the crystalline grain size obtd. by X-ray analysis are regulated to specified value. CONSTITUTION:As for indium oxide powder and tin oxide power, the ratio of the average grain size obtd. by grain size measurement to the diameter equivalent to specific surface area obtd. by a BET method is regulated to 1 to 10. On the other hand, the ratio of the diameter equivalent to the specific surface area obtd. by a BET method to the crystalline grain size obtd. by X-ray analysis is regulated to <=2. The powder is obtd. by subjecting indium oxide and tin oxide or the hydroxide and chloride which are the precursors of the oxides to calcining. The content of the tin oxide powder to the indium oxide powder is preferably regulated to several wt.% to ten-odd wt.%. This ITO powder is subjected to compacting and atmospheric sintering, by which the high density ITO sintered compact having 6.8 to 7.13g/cm<3> density, 1 to 20mum grain size and <=10mum maximum pores can be obtd. |
