| 摘要 |
A plasma generation system comprises a two-by-two or larger array of alternating magnetic poles set proximate to an insulating window in a chamber containing a process gas. The magnetic poles are ferromagnetic core coils driven by a radio frequency power source at sufficient energies to generate a plasma within the process gas chamber. The magnetic poles are included in ferromagnetic core coils that are wired to the radio frequency power source such that each magnetic pole is surrounded equally in the plane of the insulating window by adjacent magnetic poles of opposite magnetic polarity and uniform magnitudes. In a two-by-two array, the two sets of opposite corners have opposite magnetic polarities.
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