发明名称 Electronic coatings using filled borosilazanes
摘要 The present invention relates to a method of forming coatings on electronic substrates and the substrates coated thereby. The method comprises applying a coating comprising a borosilazane and a filler on a substrate and heating the coated substrate at a temperature sufficient to convert the borosilazane to a ceramic coating.
申请公布号 US5436084(A) 申请公布日期 1995.07.25
申请号 US19940223297 申请日期 1994.04.05
申请人 DOW CORNING CORPORATION 发明人 HALUSKA, LOREN A.;MICHAEL, KEITH W.
分类号 B01J19/00;C04B35/622;C23C24/08;C23C26/00;H01B3/12;H01L21/316;H01L23/29;H05K1/03;(IPC1-7):B32B9/00 主分类号 B01J19/00
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