| 摘要 |
PCT No. PCT/JP92/01304 Sec. 371 Date Mar. 28, 1994 Sec. 102(e) Date Mar. 28, 1994 PCT Filed Oct. 7, 1992 PCT Pub. No. WO93/07728 PCT Pub. Date Apr. 15, 1993.This invention realizes an ultrasonic probe wherein wiring is substantially eliminated between piezoelectric vibrators and signal sending/receiving circuits in the probe. The ultrasonic probe comprises a vibrator array and a semiconductor wafer on which signal sending/receiving circuits for the vibrator array are integrated, with the wafer being glued to the vibrator array by means of conductive adhesive. Fabricated by being integrated on the semiconductor wafer are signal sending/receiving circuits for individual piezoelectric vibrators positioned coincidently to the arrangement of signal electrodes of the piezoelectric vibrators of the ultrasonic probe, and each signal sending/receiving circuit has a conductive buried layer, which is in connection with the output terminal of the sending circuit and the input terminal of the receiving circuit, exposed to the semiconductor wafer on the side of the vibrator array glued surface.
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