| 摘要 |
<p>PURPOSE:To manufacture a semiconductor manufacturing jig so that the jig can have sufficiently high purity and members manufactured from quartz glass can be finished to prescribed dimensions without deformation by setting the members in a furnace tube and assembling the members after purifying the members by supplying halogen-containing gas to the furnace tube. CONSTITUTION:After manufacturing members 1-5 constituting a semiconductor manufacturing jig from quartz glass, the members l-5 are set in a furnace tube and purified by supplying a halogen-containing gas to the furnace under a prescribed processing condition. Then the purified members 1-5 are assembled into the semiconductor manufacturing jig. Supporting bars 1-3 and both side frames 4 and 5 constituting a semiconductor wafer boat are manufactured from quartz glass by pulverizing natural rock crystal and molding the particles into each member, and then, melting the molded bodies. Then the members 1-5 are set in a furnace tube and purified by using a hydrogen chloride gas at a furnace temperature of 1,150 deg.C. Thereafter, the boat is formed by assembling the purified members l-5.</p> |
