| 摘要 |
PURPOSE: To inspect the completeness of coupling at a grounding level by inspecting the preset electrical characteristic of a handling device at a plurality of positions along the travel route thereof, and then generating the first output signal at a stage where the electrical characteristic does not meet the required criterion. CONSTITUTION: Each resistance measurement device 21 is made of divided voltage circuits including resistors 23 and 25 connected in series between an input end 29 and a reference end 27 having corresponding measurement positions coupled to each other in a handler. A coupling part 31 between the resistors 23 and 25 is connected to the pin of a zone selective multiplexer 40 via a link 33. The multiplexer 40 operates to sequentially connect the link 33 to the first input end 43 of a comparison circuit 45 from each of the voltage divided circuits. Furthermore, the second input end 51 of the circuit 45 is connected to the coupling part 71 of a resistance reference circuit 61. Also, the multiplexer 40, and demultiplexers 50 and 100 are concurrently scanned with the scan control unit 120, thereby periodically scanning each measurement positions in the handler. |
