| 摘要 |
PURPOSE:To obtain such a treating device that its pressure adjusting mechanism can operate normally even when dew condensation occurs and the reverse diffusion of a poisonous gas into the atmosphere can be prevented when no dew condensation occurs by providing exhaust means which forcibly discharges the air around the pressure adjusting mechanism within such an extent that the mechanism can operate by airtightly surrounding the mechanism. CONSTITUTION:A treating device is provided with a reaction tube 10 which houses an object 17 to be treated and heat-treats the object 17, at least one liquid reservoir 23 provided in the middle of an exhaust tube 21 or 22 connected to the tube 10, a waste liquid discharging section 50 connected to the section 23 through a waste liquid discharging tube 51, and a pressure adjusting mechanism 40. In such a treating device, exhaust means 25 and 26 are provided so as to airtightly surround the mechanism 40 and forcibly discharge the air around the mechanism 40 within such an extent that the mechanism 40 can operate. For example, a scavenger section 25 is constituted so that the section 25 can discharge such a poisonous as the HC gas, etc., leaking out from the tube 10 and mechanism 40 to a forcibly discharging mechanism through a suction tube 26. |
