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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07183465(A)
申请公布日期
1995.07.21
申请号
JP19930327703
申请日期
1993.12.24
申请人
KAWASAKI STEEL CORP
发明人
KANEKO SEIJITSU;MATSUBARA NOBUNARI
分类号
H01L21/66;H01L21/82;H01L21/822;H01L27/04;H01L27/118;(IPC1-7):H01L27/04
主分类号
H01L21/66
代理机构
代理人
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