EPITAXIAL GROWTH DEVICE,申请号JP19930347694-传众专利搜索

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发明名称	EPITAXIAL GROWTH DEVICE
摘要
申请公布号	JPH07183223(A)	申请公布日期	1995.07.21
申请号	JP19930347694	申请日期	1993.12.24
申请人	SONY CORP	发明人	KIKUNO MAKOTO
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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