SUBSTRATE ARRANGEMENT PITCH CONVERTER

摘要

PURPOSE:To convert the arrangement pitch of a substrate while suppressing particles adhering to a substrate with a simple configuration. CONSTITUTION:The title converter is provided with a plurality of substrate retention members 40, a support mechanism 41, and a traveling mechanism 42. A plurality of substrate retention members 40 are provided with a retention groove 40a which can retain each substrate W at an upper part and are laid out while they are aligned in the arrangement direction of substrate so that a plurality of substrates arranged at a specific pitch can be retained. The support mechanism 41 supports a plurality of substrate retention members 40 so that they can travel freely in the arrangement direction of substrates and the attitude of the retention mechanism can be maintained on traveling. The traveling mechanism 42 are laid out at the lower part of a plurality of substrate retention members 40 and move each of a plurality of substrate retention members 40 along the arrangement direction of substrates to convert the spacing of adjacent substrate retention members 40.