| 摘要 |
PURPOSE:To realize high function property, high reliability and lower cost by providing an optical waveguide circuit with the characteristics of both an optical waveguide circuit using a semiconductor base and an optical waveguide circuit using a glass base. CONSTITUTION:A Si base 1 is put on a lower electrode 16 with heater, and a glass base 2 containing alkali metal ion is superposed on the Si base 1. A waveguide having a clad 3 and a core 4 is formed on the glass base 2. An upper electrode 17 is pushed onto the upper part of the clad 3. It is heated by the heater of the lower electrode 16 with heater to set the electrode temperature to 100 deg.C-500 deg.C. Several hundreds V-several kV of a DC voltage 18 is applied between the upper electrode 17 and the lower electrode 16, whereby an electrostatic attractive force is generated between the Si base 1 and the glass base 2 to cause a chemical bonding on the critical surface. Thus, an optical waveguide circuit in which both the bases 1, 2 are integrally connected without using an adhesive can be constituted. |
