| 摘要 |
<p>PURPOSE:To uniformize the electron emission characteristics by applying constant voltage for a prescribed period and then applying voltage higher than the former level for electric communication treatment to form an electron emitting part of an electron emitting element. CONSTITUTION:An organometal solution is applied between element electrodes 5, 6 formed on the surface of an insulating substrate 1 to form an organometal thin film and then the film is heated and fired to form an electron emitting part composing thin film 2. Following that, forming voltage with a prescribed voltage waveform is applied between the electrodes 5, 6 to locally break, deform, or denature the film 2 and to form an electron emitting part 3. At the time when the forming treatment is carried out, the film 2 is moderately heated at constant voltage and then heated by applying voltage higher than the former constant voltage to form the part 3 within a short period. Consequently, even if the resistance of each element is not even, forming can be carried out surely without causing overload. As a result, the characteristics of each element can be made uniform.</p> |
