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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH07181227(A)
申请公布日期
1995.07.21
申请号
JP19930323506
申请日期
1993.12.22
申请人
KAWASAKI STEEL CORP
发明人
UEDA TAKASHI
分类号
G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
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