ELECTROCHEMICAL DEPOSITION DEVICE AND APPARATUS AND METHOD OF ELECTROCHEMICAL DEPOSITION USING THE SAME
摘要
An electrochemical deposition device (10) comprises an electrode and a capillary tube (20) or rod (40) for retaining a hanging drop of electrolyte in contact with a region of a substrate surface of the electrode.
申请公布号
WO9519458(A1)
申请公布日期
1995.07.20
申请号
WO1995GB00090
申请日期
1995.01.18
申请人
UNIVERSITY OF WARWICK;BARTLETT, PHILIP, NIGEL;GARDNER, JULIAN, WALTER
