| 摘要 |
<p>PURPOSE:To provide a field emission type electron source in which the resistance between a cathode and each emitter cone is kept to be almost constant and whose mounting density is improved. CONSTITUTION:A stripe-like cathode 2 is formed on an insulating substrate 1, window opening process is carried out in the cathode 2, a first resistor layer 3 and a second resistor layer 7 are formed in the opened window, and at the same time, an insulating layer 4 and a gate electrode 5 are formed on the layers. An open part is formed on the gate electrode 5 and the insulating layer 4 and emittor cones 6 are formed in the open part. The emission in the emitter cones (6-1)-(6-3) in the cathode region is uniformalized by making the resistance of the second resistor layer 7 lower than that of the first resistor layer 3.</p> |
